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What is Micro-Electro Mechanical Systems (MEMS)

Chapter 10
Handbook of Research on Biomimetics and Biomedical Robotics
Micro-electro mechanical systems consist of micro-mechanical systems and micro-electro systems. The micro-mechanical systems are fabricated by micro-fabrication technology based on integrated circuit production lines. Small size controlling circuit of the micro-mechanical systems could be constructed as an integrated circuit. The integrated circuit is the micro-electro system. Both micro-mechanical systems and micro-electro systems can be constructed on a silicon wafer. Therefore, micro-mechanical systems and micro-electro systems could be fabricated on the same silicon wafer.
Published in Chapter:
Ant-Like Walking Behavior of MEMS Microrobot With Artificial Neural Networks IC
Ken Saito (University of California – Berkeley, USA & Nihon University, Japan), Minami Kaneko (Nihon University, Japan), and Fumio Uchikoba (Nihon University, Japan)
Copyright: © 2018 |Pages: 18
DOI: 10.4018/978-1-5225-2993-4.ch010
Abstract
This chapter explains how the MEMS microrobot system could perform the walking behavior of ants. MEMS microrobot system consists of micro-mechanical systems and micro-electro systems. The micro-mechanical systems mimic the alternating tripod gait of an ant by the shape memory alloy-type rotary actuator and the link mechanism. The micro-electro systems mimic the electrical activity of biological neural networks using the artificial neural networks IC. The artificial neural networks IC generates the driving pulses of shape memory alloy-type rotary actuator without using software programs. The micro-mechanical systems and micro-electro systems are integrated as a robot system. As a result, the authors show that the MEMS microrobot system could perform the ant-like walking behavior with a speed of 20 mm/min. The MEMS microrobot system was 0.079 g in weight, 4 mm width, 4 mm length, and 5 mm height in size. The robot system needs only the electrical power source as an external device.
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Chapter 2
MEMS Microrobot with Pulse-Type Hardware Neural Networks Integrated Circuit
Micro-electro mechanical systems consist of micro-mechanical systems and micro-electro systems. Many small size mechanical sensors were proposed as micro-mechanical systems. The micro-mechanical systems could fabricate by micro fabrication technology based on the integrated circuit production lines. Small size controlling circuit of the micro-mechanical systems could construct by integrated circuit. The integrated circuit is the micro-electro systems. Both micro-mechanical systems and micro-electro systems can construct on the silicon wafer. Therefore, micro-mechanical systems and micro-electro systems could fabricate on same silicon wafer.
Published in Chapter: MEMS Microrobot with Pulse-Type Hardware Neural Networks Integrated Circuit; From: Handbook of Research on Advancements in Robotics and Mechatronics
Full Text Chapter Download: US $37.50 Add to Cart
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